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  • Contact Person : Mr. Dan Andrew
  • Company Name : Beijing Shengtianjiayuan Technology Inc.
  • Tel : 0086-10-82416475
  • Fax : 0086-10-58948658
  • Address : ,,MBJ2638,RM1007,10/F., HO KING COMM. CTR., NO. 2-16 FA YUAN STREET, MONGKOK, HONG KONG
  • Country/Region : China

Vacuum turbo molecular pump

Vacuum turbo molecular pump
Product Detailed
The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove.

The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

SiDoLim TEP's turbomolecular pumps offer full magnetic levitation rotor, which provides for a clean, reliable vacuum for today's semiconductor and solar industries. The TEP Series turbomolecular pumps feature a five axis magnetic bearing and half rack controller requiring no tuning or battery backup.

The TEP Series offers two major types of turbomolecular pumps - high compression, and corrosion resistant.

The TEP Series offers five major types of turbomolecular pumps - temperature controlled corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

Compound Molecular Pump TEP 1300

Specification:

Part Number

TEP 1300E-LF

TEP 1300E-CF

Pump Type

Drag

Drag

Inlet Flange

ISO-200

CF-200

Outlet Flange

ISO-40

ISO-40

Pumping Speed(Air )(l/s)

1300

1300

Pressure for Max Speed(torr)

7.5×10-3

7.5×10-3

Rotation Speed(RPM)

24,000

24,000

H2 Compression Ratio

1×109

1×103

N2 Compression Ratio

1×109

1×109

Ultimate Vacuum(torr)

4.5×10-8

4.5×10-9

Run up time(min)

<6

<6

Control Unit

FD-1300K

FD-1300K

Input Voltage(VAC)

220/110±10%

220/110±10%

Cooling water(GPM)

>0.5

>0.5

Bearing type

Ceramic

Ceramic

Lubrication

Grease

Grease

Operating Orientation

Any

Any

Weight(lb/kg)

64/29

64/29

Vacuum turbo molecular pump



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