Beijing Shengtianjiayuan Technology Inc.
Main products:On-Line Orp Controller
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  • Contact Person : Mr. Dan Andrew
  • Company Name : Beijing Shengtianjiayuan Technology Inc.
  • Tel : 0086-10-82416475
  • Fax : 0086-10-58948658
  • Address : ,,MBJ2638,RM1007,10/F., HO KING COMM. CTR., NO. 2-16 FA YUAN STREET, MONGKOK, HONG KONG
  • Country/Region : China

Vacuum turbo molecular pump

Vacuum turbo molecular pump
Product Detailed
The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove.

The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

SiDoLim TEP's turbomolecular pumps offer full magnetic levitation rotor, which provides for a clean, reliable vacuum for today's semiconductor and solar industries. The TEP Series turbomolecular pumps feature a five axis magnetic bearing and half rack controller requiring no tuning or battery backup.

The TEP Series offers two major types of turbomolecular pumps - high compression, and corrosion resistant.

The TEP Series offers five major types of turbomolecular pumps - temperature controlled corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

Compound Molecular Pump TEP 250/1600E

Model

 TEP 250/1600E

Pumping speed(l/s)

1600

Compression ration

N2: 108;  H2: 5×103

Ultimate pressure(Pa)

less than 1×10-6

Rotational speed (rpm)

27000

Run-up time (min)

less than 8

Bearings

Ceramic ball bearings

Fore line flange

KF50(DN50 ISO-KF)

Inlet flange

LF250(DN250 ISO-K)

Vibration value((mm))

less than 0.1

Recommended backing pump(l/s)

15

Cooling water

temperature less than 25 °C   flow rate more than 60 l/h

Bake-out temperature

less than 100°C at pump shell

Ambient temperature (°C)

5-40

Oil charge quantity(ml)

150

Mounting position

Vertical±5°

Weight (kg)

47

Vacuum turbo molecular pump



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