Beijing Shengtianjiayuan Technology Inc.
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  • Contact Person : Mr. Dan Andrew
  • Company Name : Beijing Shengtianjiayuan Technology Inc.
  • Tel : 0086-10-82416475
  • Fax : 0086-10-58948658
  • Address : ,,MBJ2638,RM1007,10/F., HO KING COMM. CTR., NO. 2-16 FA YUAN STREET, MONGKOK, HONG KONG
  • Country/Region : China

Vacuum turbo molecular pump

Vacuum turbo molecular pump
Product Detailed
The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove.

The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

SiDoLim TEP's turbomolecular pumps offer full magnetic levitation rotor, which provides for a clean, reliable vacuum for today's semiconductor and solar industries. The TEP Series turbomolecular pumps feature a five axis magnetic bearing and half rack controller requiring no tuning or battery backup.

The TEP Series offers two major types of turbomolecular pumps - high compression, and corrosion resistant.

The TEP Series offers five major types of turbomolecular pumps - temperature controlled corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

Compound Molecular Pump TEP 700

Part Number

TEP 700E-LF

TEP 700E-CF

Pump Type

Drag

Drag

Inlet Flange

ISO-160

ISO-160

Outlet Flange

ISO-40

ISO-40

Pumping Speed(Air )(l/s)

700

700

Pressure for Max Speed(torr)

7.5×10-3

7.5×10-3

Rotation Speed(RPM)

36,000

36,000

H2 Compression Ratio

6×106

6×106

N2 Compression Ratio

1×109

1×109

Ultimate Vacuum(torr)

4.5×10-9

4.5×10-10

Run up time(min)

<4

<4

Control Unit

FD-700K

FD-700K

Input Voltage(VAC)

220/110±10%

220/110±10%

Cooling water(GPM)

>0.5

>0.5

Bearing type

CeramicCeramic

Lubrication

Grease

Grease

Operating Orientation

Any

Any

Weight(lb/kg)

42/19

42/19

Vacuum turbo molecular pump



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