Beijing Shengtianjiayuan Technology Inc.
Main products:On-Line Orp Controller
Products
Contact Us
  • Contact Person : Mr. Dan Andrew
  • Company Name : Beijing Shengtianjiayuan Technology Inc.
  • Tel : 0086-10-82416475
  • Fax : 0086-10-58948658
  • Address : ,,MBJ2638,RM1007,10/F., HO KING COMM. CTR., NO. 2-16 FA YUAN STREET, MONGKOK, HONG KONG
  • Country/Region : China

Vacuum turbo molecular pump

Vacuum turbo molecular pump
Product Detailed
The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove.

The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

SiDoLim TEP's turbomolecular pumps offer full magnetic levitation rotor, which provides for a clean, reliable vacuum for today's semiconductor and solar industries. The TEP Series turbomolecular pumps feature a five axis magnetic bearing and half rack controller requiring no tuning or battery backup.

The TEP Series offers two major types of turbomolecular pumps - high compression, and corrosion resistant.

The TEP Series offers five major types of turbomolecular pumps - temperature controlled corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

Turbomolecular Pump TEP 100/110

  

110 series molecular pump unit is a clean and ultra-high vacuum acquisition equipment with type TEP 100/110 series performance turbo molecular pump, mechanical fore-pump, cutoff vent valve, backing line, molecular pump power pack, control power pack etc. assembled on the stand. It provides convenient installation, simple operation, easy connection, reliable performance, and is widely used in surface analysis, accelerator technique, semi-conductive devices, plasma technique, manufacturing of electro-vacuum elements and vacuum technique etc.

Part Number

TEP 100/110LF

TEP 100/110CF

Pump Type

Turbo

Turbo

Inlet Flange

ISO-100

CF-100

Outlet Flange

ISO-25

ISO-25

Pumping Speed(Air )(l/s)

110

110

Pressure for Max Speed(torr)

7.5×10-4

7.5×10-4

Rotation Speed(RPM)

42,300

42,300

H2 Compression Ratio

5×102

5×102

N2 Compression Ratio

1×108

1×108

Ultimate Vacuum(torr)

4.5×10-8

4.5×10-9

Run up time(min)

<2

<2

Control Unit

FD-110A

FD-110A

Input Voltage(VAC)

220/110±10%

220/110±10%

Cooling water(GPM)

>0.5

>0.5

Bearing type

Ceramic

Ceramic

Lubrication

Oil

Oil

Operating Orientation

Vertical or Horizontal

Vertical or Horizontal

Weight(lb/kg)

18/8

18/8

Vacuum turbo molecular pump



Copyright Notice @ 2008-2012 ECVERY Limited and/or its subsidiaries and licensors. All rights reserved.